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Title
MEMS/MOEMS components and their applications
Title Supplement
26 - 27 January 2004, San Jose, California, USA
Person Involved
Corporate Author
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Publisher
Publishing Place
Bellingham, WA
Publication Date
2004
Series
Proceedings of SPIE; 5344
ISBN
0-8194-5252-1