Title

Electron-beam, x-ray, and ion-beam submicrometer lithographies for manufacturing

Title Supplement

6-7 March 1991, San Jose, California

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

1991

Series

Proceedings of SPIE; 1465

ISBN

0-8194-0564-7

Conference