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Title
Dry processing for submicrometer lithography
Title Supplement
12-13 October 1989, Santa Clara, California
Person Involved
Corporate Author
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Sematech, Austin/Tex.
Publisher
Publishing Place
Bellingham, WA
Publication Date
1990
Series
Proceedings of SPIE; 1185
ISBN
0-8194-0221-4