Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM

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  • Publication
    Sensor Systems for Extremely Harsh Environments
    ( 2023-10-31)
    Kappert, Holger
    ;
    Schopferer, Sebastian
    ;
    Saeidi, Nooshin
    ;
    Döring, Ralf
    ;
    Ziesche, Steffen
    ;
    Olowinsky, Alexander
    ;
    Naumann, Falk
    ;
    Jägle, Martin
    ;
    Spanier, Malte
    ;
    Grabmaier, Anton
    Sensors are key elements for capturing environmental properties and are today indispensable in the industry for monitoring and control of industrial processes. Many applications are demanding for highly integrated intelligent sensors to meet the requirements on safety, clean and energy efficient operation or to gain process information in the context of industry 4.0. While in many everyday objects highly integrated sensor systems are already state of the art, the situation in an industrial environment is clearly different. Frequently the use of sensor systems is impossible, due to the fact that the extreme ambient conditions of industrial processes like high operating temperatures or strong mechanical loads do not allow a reliable operation of sensitive electronic components. Eight Fraunhofer Institutes have bundled their competencies and have run the Fraunhofer Lighthouse Project ‘eHarsh’ to overcome this situation. The project goal was to realize sensor systems for extremely harsh environments, whereby sensor systems are not only pure sensor elements, rather containing one or multiple sensor elements and integrated readout electronics. Various technologies which are necessary for the realization of such sensor systems have been identified, developed and finally bundled in a technology platform. These technologies are e. g. MEMS and ceramic based sensors, SOI-CMOS based integrated electronics, board assembly and laser based joining technologies. All these developments have been accompanied by comprehensive tests, material characterization and reliability simulations. Based on the platform a pressure sensor for turbine applications has been realized to prove the performance of the eHarsh technology platform.
  • Publication
    Sensor Systems for Extremely Harsh Environments
    ( 2022-10-01)
    Kappert, Holger
    ;
    Schopferer, Sebastian
    ;
    Saeidi, Nooshin
    ;
    Döring, Ralf
    ;
    Ziesche, Steffen
    ;
    Olowinsky, Alexander
    ;
    Naumann, Falk
    ;
    Jägle, Martin
    ;
    Spanier, Malte
    ;
    Grabmaier, Anton
    Sensors are key elements for capturing environmental properties and are today indispensable in the industry for monitoring and control of industrial processes. Many applications are demanding for highly integrated intelligent sensors to meet the requirements on safety, clean, and energy-efficient operation, or to gain process information in the context of industry 4.0. While in many everyday objects highly integrated sensor systems are already state of the art, the situation in an industrial environment is clearly different. Frequently, the use of sensor systems is impossible due to the fact that the extreme ambient conditions of industrial processes like high operating temperatures or strong mechanical loads do not allow a reliable operation of sensitive electronic components. Eight Fraunhofer Institutes have bundled their competencies and have run the Fraunhofer Lighthouse Project “eHarsh” to overcome this situation. The project goal was to realize sensor systems for extremely harsh environments, whereby sensor systems are more than pure sensors, rather these are containing one or multiple sensing elements and integrated readout electronics. Various technologies, which are necessary for the realization of such sensor systems, have been identified, developed, and finally bundled in a technology platform. These technologies are, e.g., MEMS and ceramic-based sensors, SOI-CMOS-based integrated electronics, board assembly and laser-based joining technologies. All these developments have been accompanied by comprehensive tests, material characterization, and reliability simulations. Based on the platform, a pressure sensor for turbine applications has been realized to prove the performance of the eHarsh technology platform.
  • Publication
    Smart sensor systems for extremely harsh environments
    ( 2021)
    Kappert, Holger
    ;
    Schopferer, Sebastian
    ;
    Döring, Ralf
    ;
    Ziesche, Steffen
    ;
    Olowinsky, Alexander
    ;
    Naumann, Falk
    ;
    Jägle, M.
    ;
    Ostmann, Andreas
    Sensors systems are key elements for capturing environmental properties and are increasingly important in industry 4.0 for the intelligent control of processes. However, under harsh operating conditions like high temperatures, high mechanic load or aggressive environments, standard electronics cannot be used. Eight Fraunhofer institutes have therefore bundled their competencies in sensors, microelectronics, assembly, board design, laser applications and reliability analysis to establish a technology platform for sensor systems working under extreme conditions.