Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM

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  • Publication
  • Publication
    Kontinuierliche ortsaufgelöste HPLC auf Basis eines Multifunktionsventils
    ( 1997)
    Bauer, J.
    ;
    Götze, H.-J.
    ;
    Kiffmeyer, T.
    ;
    Jursch, M.
  • Publication
    Supramolecular architectures of cellulose derivatives
    ( 1997)
    Schulze, M.
    ;
    Wegner, G.
    ;
    Seufert, M.
    ;
    Tebbe, H.
    ;
    Buchholz, V.
  • Publication
  • Publication
    Comparative film thickness determination by atomic force microscopy and ellipsometry for ultrathin prepolymer films
    ( 1995)
    Gesang, T.
    ;
    Fanter, D.
    ;
    Höper, R.
    ;
    Possart, W.
    ;
    Hennemann, O.-D.
    Ellipsometry and Atomic Force Microscopy (AFM) were utilized to study the film thickness of continuous and discontinuous polymer films in the 1 to 20 nm thickness range on smooth silicon wafers and on structured aluminum substrates. The methods of exploiting AFM for thickness measurements with a high spatial resolution are described. For continuous films, the AFM method is a direct one, i.e. it does not rely on any model. There is excellent agreement between AFM and ellipsometry in the 1 to 10 nm thickness range. Very small systematic deviations in this range, but big deviations above 10 nm occur and are discussed. The film preparation method, spin coating, was characterized to result in prepolymer films with a very homogeneous thickness. Discontinuous films with 2 to 9 nm thickness were also evaluated by both methods of thickness determination. In this case, for one of the AFM approaches a model has to be utilised, too. The agreement between both methods ranged from very good to poor depending on the kind of sample and on the kind of AFM determination method
  • Publication
    Prepolymer film growth by adsorption out of solution on silicon and aluminium. An atomic force microscope study
    ( 1995)
    Gesang, T.
    ;
    Höper, R.
    ;
    Dieckhoff, S.
    ;
    Hartwig, A.
    ;
    Possart, W.
    ;
    Hennemann, O.-D.
    A cyanurate prepolymer was applied to smooth silicon wafers or to distinctly structured aluminum coatings. The surface composition of the substrates was investigated by X-ray Photoelectron Spectroscopy (XPS), Auger Electron Spectroscopy (AES) and Ellipsometry. The application methods, spin coating and dip coating represent adsorption by a technical process exerting significant shear stresses or nearly equilibrated conditions, respectively. The mean thickness of the prepolymer film was adjusted by variation of the concentration of the solution and checked by ellipsometry. Atomic Force Microscopy (AFM) monitored the development of the respective film morphologies of all 4 systems (silicon / aluminum, spin / dip coating) in the mean film thickness range from 1 to 50 nm.
  • Publication
    Quantitative Erfassung von Oberflächentopographien
    ( 1995)
    Gesang, T.
    ;
    Höper, R.
    ;
    Possart, W.
    ;
    Hennemann, O.-D.
    Some applications of Atomic Force Microscopy in adhesion science and technology are presented. The essential advantage of AFM over mere imaging methods is the capability of quantitatively acquiring the topography of the sample surface. This in turn allows a number of useful quantitative evaluations of the surface. The examples described are fluorination and oxygen plasma treatment of a polypropylene foil for improvement of adhesion. Moreover it is evidenced that AFM can provide nanoscopic insight into adhesion phenomena by imaging the islands of adsorbed adhesive molecules. They show specific characteristics of their geometric shape depending on the kind of adhesive molecule and on the type of substrate.
  • Publication
    XPS of the interphase between PMMA and metals. A study of degradation and interaction
    ( 1995)
    Possart, W.
    ;
    Schlett, V.
    XPS was applied to PMMA layers of varying thickness in the nanometer range on gold and natural aluminium surfaces, respectively. The numerical decomposition of the core levels into the contributions from the variosus atomic bonding states reveals some peculiar features of the interphase region on the metals. First, for both metals special mechanisms of thermal destruction are deduced. On Au the splitting of complete methacrylate side groups and, even more intense, the stripping of (-O-Ch3)-units is found while on Al the side group scission is verified only. Secondly, the metals reveal different effects on the electron density in the methacrylate groups. Au appiars to be inert but the natural Al surface exerts a withdrawing effect on the electrons of both the carbon and the oxygen atoms in the side groups.
  • Publication
    XPS studies of thin polycyanurate films on silicon wafers
    ( 1995)
    Dieckhoff, S.
    ;
    Schlett, V.
    ;
    Possart, W.
    ;
    Hennemann, O.-D.
    Tomographic scanners are classified by various parameters, and two which are important are the geometric resolution and the contrast resolution. A numerical study has been reported previously on the application of certain estimates of theoretical error in the tomographic inversion formula. This study deals with the experimental aspects of those error estimates, and further consolidates the findings of the previous work in representing contrast by a mathematical quantity related to the object cross-section. Thin films of a diandicyanato bisphenol A (DCBA) prepolymer on silicon substrates have been investigated. Angle dependend X-ray photoelectron spectroscopy reveals some thickness-dependent features, which lead to an adsorption model for the DCBA prepolymer molecules. The adsorption of the first layer is governed by the interaction of the triazine rings with the substrate surface.