Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM

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  • Publication
    Sensor Systems for Extremely Harsh Environments
    ( 2023-10-31)
    Kappert, Holger
    ;
    Schopferer, Sebastian
    ;
    Saeidi, Nooshin
    ;
    Döring, Ralf
    ;
    Ziesche, Steffen
    ;
    Olowinsky, Alexander
    ;
    Naumann, Falk
    ;
    Jägle, Martin
    ;
    Spanier, Malte
    ;
    Grabmaier, Anton
    Sensors are key elements for capturing environmental properties and are today indispensable in the industry for monitoring and control of industrial processes. Many applications are demanding for highly integrated intelligent sensors to meet the requirements on safety, clean and energy efficient operation or to gain process information in the context of industry 4.0. While in many everyday objects highly integrated sensor systems are already state of the art, the situation in an industrial environment is clearly different. Frequently the use of sensor systems is impossible, due to the fact that the extreme ambient conditions of industrial processes like high operating temperatures or strong mechanical loads do not allow a reliable operation of sensitive electronic components. Eight Fraunhofer Institutes have bundled their competencies and have run the Fraunhofer Lighthouse Project ‘eHarsh’ to overcome this situation. The project goal was to realize sensor systems for extremely harsh environments, whereby sensor systems are not only pure sensor elements, rather containing one or multiple sensor elements and integrated readout electronics. Various technologies which are necessary for the realization of such sensor systems have been identified, developed and finally bundled in a technology platform. These technologies are e. g. MEMS and ceramic based sensors, SOI-CMOS based integrated electronics, board assembly and laser based joining technologies. All these developments have been accompanied by comprehensive tests, material characterization and reliability simulations. Based on the platform a pressure sensor for turbine applications has been realized to prove the performance of the eHarsh technology platform.
  • Publication
    Sensor Systems for Extremely Harsh Environments
    ( 2022-10-01)
    Kappert, Holger
    ;
    Schopferer, Sebastian
    ;
    Saeidi, Nooshin
    ;
    Döring, Ralf
    ;
    Ziesche, Steffen
    ;
    Olowinsky, Alexander
    ;
    Naumann, Falk
    ;
    Jägle, Martin
    ;
    Spanier, Malte
    ;
    Grabmaier, Anton
    Sensors are key elements for capturing environmental properties and are today indispensable in the industry for monitoring and control of industrial processes. Many applications are demanding for highly integrated intelligent sensors to meet the requirements on safety, clean, and energy-efficient operation, or to gain process information in the context of industry 4.0. While in many everyday objects highly integrated sensor systems are already state of the art, the situation in an industrial environment is clearly different. Frequently, the use of sensor systems is impossible due to the fact that the extreme ambient conditions of industrial processes like high operating temperatures or strong mechanical loads do not allow a reliable operation of sensitive electronic components. Eight Fraunhofer Institutes have bundled their competencies and have run the Fraunhofer Lighthouse Project “eHarsh” to overcome this situation. The project goal was to realize sensor systems for extremely harsh environments, whereby sensor systems are more than pure sensors, rather these are containing one or multiple sensing elements and integrated readout electronics. Various technologies, which are necessary for the realization of such sensor systems, have been identified, developed, and finally bundled in a technology platform. These technologies are, e.g., MEMS and ceramic-based sensors, SOI-CMOS-based integrated electronics, board assembly and laser-based joining technologies. All these developments have been accompanied by comprehensive tests, material characterization, and reliability simulations. Based on the platform, a pressure sensor for turbine applications has been realized to prove the performance of the eHarsh technology platform.
  • Publication
    Sensor Systems for Extremely Harsh Environments
    ( 2022)
    Kappert, Holger
    ;
    Schopferer, Sebastian
    ;
    Saeidi, Nooshin
    ;
    Ziesche, Steffen
    ;
    Olowinsky, Alexander
    ;
    Naumann, Falk
    ;
    Jägle, Martin
    ;
    Spanier, Malte
    Sensors are key elements for the detection of environmental properties and are indispensable in industrial applications for process monitoring and intelligent control of processes. While highly integrated sensor systems are already state -of-theart in many everyday areas, the situation in an industrial environment is significantly different. The use of sensor systems is often not possible because the extreme environmental conditions of industrial processes such as high operating temperatures or strong mechanical loads do not allow the reliable operation of sensitive electronic components. As part of the Fraunhofer Lighthouse project eHarsh, eight institutes have bundled their competencies and created a technology platform as a basis for the development of sensor systems for extremely harsh environments.
  • Publication
    Smart sensor systems for extremely harsh environments
    ( 2021)
    Kappert, Holger
    ;
    Schopferer, Sebastian
    ;
    Döring, Ralf
    ;
    Ziesche, Steffen
    ;
    Olowinsky, Alexander
    ;
    Naumann, Falk
    ;
    Jägle, M.
    ;
    Ostmann, Andreas
    Sensors systems are key elements for capturing environmental properties and are increasingly important in industry 4.0 for the intelligent control of processes. However, under harsh operating conditions like high temperatures, high mechanic load or aggressive environments, standard electronics cannot be used. Eight Fraunhofer institutes have therefore bundled their competencies in sensors, microelectronics, assembly, board design, laser applications and reliability analysis to establish a technology platform for sensor systems working under extreme conditions.
  • Publication
    Biochip readout system for point-of-care applications
    ( 2009)
    Brandenburg, A.
    ;
    Curdt, F.
    ;
    Sulz, G.
    ;
    Ebling, F.
    ;
    Nestler, J.
    ;
    Wunderlich, K.
    ;
    Michel, D.
    A new low cost biochip readout system based on total internal reflection fluorescence (TIRF) including microfluidics is presented. The system is suitable for point-of-care diagnostics employing disposable substrates made of polymer foils producible at very low costs. Results for the reader sensitivity and dynamic range in comparison to state of the art readers are presented. The sensitivity is comparable to laser scanner systems developed for lab applications, although the newly developed TIRF system is built up much simpler and low cost substrates are used. The dynamic range and the on chip homogeneity were investigated. As an example for future POC applications, an immunoassay for the inflammation parameter C-reactive protein (CRP) is investigated. The sensitivity of these assays is in the range of 1 ng/ml, being sufficient for many parameters of clinical relevance.
  • Publication
    Highly integrated polymer-based technology platform for in-vitro diagnostics
    ( 2008)
    Otto, Thomas
    ;
    Nestler, Jörg
    ;
    Morschhauser, Andreas
    ;
    Schüller, Martin
    ;
    Geßner, T.
    ;
    Krissler, Jan
    ;
    Ebling, Frank
    ;
    Wegener, Michael
    ;
    Grzesiak, Andrzej
    ;
    Burgard, Matthias
    ;
    Brandenburg, Albrecht
    ;
    Sulz, Gerd
    ;
    Nebling, Eric
    ;
    Hintsche, Rainer
    ;
    Wirth, Ingo
    ;
    Godlinski, Dirk
    ;
    Tovar, Günter E.M.
    ;
    Weber, Achim
    ;
    Ehrentreich-Förster, Eva
    ;
    Gajovic-Eichelmann, Nenad
    ;
    Bier, Frank F.
    Systems for in-vitro diagnostics are of great interest especially in the point-of-care diagnostic market. Specialized integrated approaches have already been developed and successfully marketed, but were mainly focused on basic blood parameter determination. This paper describes a new, more flexible approach for an in-vitro diagnostic cartridge, which is able to hold different types of sensors (optical and electrochemical), integrated reagents as well as integrated microfluidic actuators. The platform will be capable of running both protein and nucleic acid analysis.