Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM

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  • Patent
    Einrichtung zur Anzeige der elektrischen Verbrauchsdaten eines Verbrauchers
    ( 1999)
    Haberger, K.
    ;
    Bollmann, D.
    The invention relates to an element for displaying the electrical consumption data of a consumer in a power circuit. The element can be used to record the consumption data of electrical consumers, e.g. the energy consumption of personal computers, telefax machines, video recorders or copiers, over a long period of time. The element according to the invention is a function element of the power circuit, such as a plug or a socket, in which a display and measuring unit is integrated. This means that an external device for determining electrical consumption data is no longer required. The user can rather exchange existing function elements for elements according to the invention without requiring any additional space or installation work. The display and measuring unit is designed as an integrated circuit on a chip with an LC display, thus permitting the low-cost production of the element according to the invention.
  • Patent
    VERFAHREN ZUM DUENNAETZEN VON SUBSTRATEN
    ( 1994)
    Haberger, K.
    ;
    Buchner, R.
    ;
    Bollmann, D.
    In a process for the chemical thinning of etching substrates by means of chemical etchant, a predetermined thickness of a monocrystalline substrate with an undisturbed grating structure is retained by irradiating the substrate during the etching process by a radiation source with a beam impinging perpendicularly to the substrate surface, the substrate consisting of a material capable of absorbing the radiation, the wavelength of the main part of the beam being selected such that the absorption length of radiation in this wavelength in the substrate material is greater than the desired substrate thickness.