Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM

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  • Publication
    Anwendungen hydrophober Oberflächenmodifikationen in der Mikrosystemtechnik
    ( 2013)
    Georgi, L. von
    ;
    Kahle, R.
    ;
    Lang, K.-D.
    ;
    Bauer, J.
    ;
    Braun, T.
    ;
    Becker, K.-F.
    ;
    Jung, E.
    In this report, the principles and processes involved in surface modification to create hydrophobic/ hydrophilic surfaces for use in microsystems are set out. Two examples are used to illustrate this, the first being contactless placing of small microelectronic components and the second being the manipulation of reagent-containing water droplets for rapid micro-diagnosis.