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Fraunhofer-Institut für Optronik, Systemtechnik und Bildauswertung IOSB
Direct-imaging DOEs for high-NA multi-spot confocal surface measurement
Direct-imaging DOEs for high-NA multi-spot confocal microscopy
Kalibrierfreie 3D-Rekonstruktion von gekrümmten Oberflächen mittels orthographischer Projektion unter Verwendung von Reflexionsmarkern
Light field illumination. Problem-specific lighting adjustment
Ellipsometric inline inspection of dielectric substrates with nonplanar surfaces
Sensitivity enhanced roll-angle sensor by means of a quarter-waveplate
Measurement of ellipsometric data and surface orientations by modulated circular polarized light