Fraunhofer-Institut für Optronik, Systemtechnik und Bildauswertung IOSB

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  • Publication
    Direct-imaging DOEs for high-NA multi-spot confocal surface measurement
    ( 2021)
    Li, Zheng
    ;
    Taphanel, Miro
    ;
    Längle, Thomas
    ;
    Beyerer, Jürgen
    Diffractive lens arrays with overlapping apertures can produce spot arrays with high numerical apertures (NAs). Combined with low-NA objectives, they can measure a large area with high lateral resolution. However, for surface measurements, the axial resolution of such setups is still fundamentally limited by the objectives. In this work, we propose a new design of diffractive optical elements (DOEs) to overcome this problem. The proposed Direct-imaging DOEs can perform 3D high-NA multi-spot surface measurements. Laterally, a non-vanishing contrast up to 1448 lp/mm is measured with a USAF resolution target. Axially, an average height of 917.5 nm with a standard deviation of 49.9 nm is measured with a calibrated step height target of 925.5 nm.
  • Publication
    Direct-imaging DOEs for high-NA multi-spot confocal microscopy
    ( 2020)
    Li, Zheng
    ;
    Taphanel, Miro
    ;
    Längle, Thomas
    ;
    Beyerer, Jürgen
    Diffractive lens arrays with overlapping apertures can produce spots with high numerical apertures (NAs). Such diffractive optical elements (DOEs) can replace high-NA objectives and measure a large area with high resolution in transmission microscopes. However, in reflection microscopes for surface measurements, the axial resolution is still limited by the objectives. Direct-imaging DOEs are proposed to solve the problem. They can perform high-NA multi-spot measurement in reflection configurations in both lateral and axial directions. Experiments demonstrate a lateral non-vanishing contrast up to 1448 lp/mm and an axial response on a plane mirror with a full width at half maximum (FWHM) of 2.24 mm.