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Fraunhofer-Institut für Produktionsanlagen und Konstruktionstechnik IPK
Vorrichtung zur Untersuchung von Oberflaechentopographien mittels Streifen-Triangulation
Fraunhofer-Gesellschaft
2002
,
Koerner, K.
,
Holger, F.
,
Krahn, A.
,
Puder, J.
The description refers to a device for examining the topographies of light scattering object surfaces, comprising a light source, a Fizeau interferometer consisting of a plane mirror surface and a beam splitter surface inclined in relation to said plane mirror surface, for the generation of an interference fringe pattern, and an image receiver. The invention is characterized by the fact that the beam splitter surface of the Fizeau interferometer is arranged downstream of an optical element having an optically active surface with total reflection effect for bundles reflected several times in the Fizeau interferometer. Alternatively the beam splitter surface of the Fizau interferometer is arranged downstream of an optically active surface having a total relection effect for bundles reflected several times in the Fizeau interferometer in such a way that the beam splitter surface and the optically active surface are surfaces of a prism.