Interferometric measurement of fine-machined surfaces
1992,
Spur, G.,
Nyarsik, L.,
Körner, K.,
Krahn, A.
A possibility for measuring the form, waviness and roughness of fine-machined surfaces by interferometric means is discussed. A variety of fine-machined surfaces shows parameters of hight in the range of microns. So it is necessary to increase the interfermometric increment in a two-beam-interferometer with visible light by grazing incidence illumination. This principle was investigated in a new prism interferometer. A test method for the interferometer is proposed and measurements are represented.
