Fraunhofer-Institut für Produktionsanlagen und Konstruktionstechnik IPK

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Grazing-incidence interference microscopy for the measurement of topography of fine-machined surfaces

1993 , Spur, G. , Körner, K. , Nyarsik, L. , Fritz, H. , Uhlmann, E.

A possibility for measuring the form, waviness and roughness of fine-machined surfaces by interferometric means is discussed. A variety of fine-machined surfaces shows parameters in the range of microns. So it is necessary to increase the interferometric increment in a two-beam-interferometer with visible light by grazing incidence illumination. This principle was investigated in a new prism interferometer and in a new grazing incidence microscope. Test measurements are represented and discussed.

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Imaging characteristics of prism interferometers

1993 , Spur, G. , Nyarsik, L. , Körner, K.

The micro topography of technical surfaces was measured with a prism interferometer. A new anamorphic double-module serving as an interference head was designed for this purose. This interference head provides a shear-free-two-beam interference image and allows computer-controlled phase-shifting for phase-sampling methods. The distance between the specimen's surface and the module may exceed 1 mm. A mathematical-physical model for prism interferometers was worked out to properly evaluate the information on the surface which has had been gained by means of interferometric images.

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Interferometric measurement of fine-machined surfaces

1992 , Spur, G. , Nyarsik, L. , Körner, K. , Krahn, A.

A possibility for measuring the form, waviness and roughness of fine-machined surfaces by interferometric means is discussed. A variety of fine-machined surfaces shows parameters of hight in the range of microns. So it is necessary to increase the interfermometric increment in a two-beam-interferometer with visible light by grazing incidence illumination. This principle was investigated in a new prism interferometer. A test method for the interferometer is proposed and measurements are represented.

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