Fraunhofer-Institut für Produktionsanlagen und Konstruktionstechnik IPK

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  • Publication
    Grazing-incidence interference microscopy for the measurement of topography of fine-machined surfaces
    ( 1993)
    Spur, G.
    ;
    Körner, K.
    ;
    Nyarsik, L.
    ;
    Fritz, H.
    ;
    Uhlmann, E.
    A possibility for measuring the form, waviness and roughness of fine-machined surfaces by interferometric means is discussed. A variety of fine-machined surfaces shows parameters in the range of microns. So it is necessary to increase the interferometric increment in a two-beam-interferometer with visible light by grazing incidence illumination. This principle was investigated in a new prism interferometer and in a new grazing incidence microscope. Test measurements are represented and discussed.
  • Publication
    Interferometric measurement of fine-machined surfaces
    ( 1992)
    Spur, G.
    ;
    Nyarsik, L.
    ;
    Körner, K.
    ;
    Krahn, A.
    A possibility for measuring the form, waviness and roughness of fine-machined surfaces by interferometric means is discussed. A variety of fine-machined surfaces shows parameters of hight in the range of microns. So it is necessary to increase the interfermometric increment in a two-beam-interferometer with visible light by grazing incidence illumination. This principle was investigated in a new prism interferometer. A test method for the interferometer is proposed and measurements are represented.