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Operating map - tool for plating functional layers

2010 , Paatsch, W. , Mollath, G.

The increasing demand for special functional layers and layer systems requires reliable electroplating process control. The use of operating maps is demonstrated covering all aspects of the layer formation starting from nucleation, crystal growth and structure as a function of electrochemical kinetics as well as hydrodynamics and mass transport. In particular, the influence of pulse plating of Zn as an example is demonstrated. Finally, techniques to characterise the deposits such as X-ray fluorescence (layer thickness and distribution), X-ray diffraction (texture and grain size) as well as methods to evaluate hardness, Young's modulus and ductility are applied. The data are used to produce the operating map via a system of neural networks so that the effect of changing electrochemical deposition parameters and resultant deposit characteristics can be determined. This methodology has the advantage of short access time and high reliability.

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Publication

Optimierung von Prozessparametern sowie Praxiserfahrung

2010 , Paatsch, W. von , Mollath, G.