Fraunhofer-Institut für Produktionsanlagen und Konstruktionstechnik IPK

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  • Patent
    Vorrichtung zur Untersuchung von Oberflaechentopographien mittels Streifen-Triangulation
    ( 2002)
    Koerner, K.
    ;
    Holger, F.
    ;
    Krahn, A.
    ;
    Puder, J.
    The description refers to a device for examining the topographies of light scattering object surfaces, comprising a light source, a Fizeau interferometer consisting of a plane mirror surface and a beam splitter surface inclined in relation to said plane mirror surface, for the generation of an interference fringe pattern, and an image receiver. The invention is characterized by the fact that the beam splitter surface of the Fizeau interferometer is arranged downstream of an optical element having an optically active surface with total reflection effect for bundles reflected several times in the Fizeau interferometer. Alternatively the beam splitter surface of the Fizau interferometer is arranged downstream of an optically active surface having a total relection effect for bundles reflected several times in the Fizeau interferometer in such a way that the beam splitter surface and the optically active surface are surfaces of a prism.
  • Publication
    Interferometric measurement of fine-machined surfaces
    ( 1992)
    Spur, G.
    ;
    Nyarsik, L.
    ;
    Körner, K.
    ;
    Krahn, A.
    A possibility for measuring the form, waviness and roughness of fine-machined surfaces by interferometric means is discussed. A variety of fine-machined surfaces shows parameters of hight in the range of microns. So it is necessary to increase the interfermometric increment in a two-beam-interferometer with visible light by grazing incidence illumination. This principle was investigated in a new prism interferometer. A test method for the interferometer is proposed and measurements are represented.
  • Publication
    Interferometrische Messung der Form, Welligkeit und Rauheit feinbearbeiteter Oberflächen
    ( 1992)
    Nyarsik, L.
    ;
    Körner, K.
    ;
    Krahn, A.
    ;
    Spur, G.
    A possibility for measuring the form, waviness and roughness of fine-machined surfaces by interferometric means is discussed. A variety of fine-machined surfaces shows parameters of hight in the range of microns. So it is necessary to increase the interferometric increment in a two-beam-interferometer with visible light by grazing incidence illumination. This principle was investigated in a new prism interferometer. A test method for the interferometer is proposed and measurements are represented.