Fraunhofer-Institut für Produktionsanlagen und Konstruktionstechnik IPK

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Interferometric measurement of fine-machined surfaces

1992 , Spur, G. , Nyarsik, L. , Körner, K. , Krahn, A.

A possibility for measuring the form, waviness and roughness of fine-machined surfaces by interferometric means is discussed. A variety of fine-machined surfaces shows parameters of hight in the range of microns. So it is necessary to increase the interfermometric increment in a two-beam-interferometer with visible light by grazing incidence illumination. This principle was investigated in a new prism interferometer. A test method for the interferometer is proposed and measurements are represented.

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Interferometrische Messung der Form, Welligkeit und Rauheit feinbearbeiteter Oberflächen

1992 , Nyarsik, L. , Körner, K. , Krahn, A. , Spur, G.

A possibility for measuring the form, waviness and roughness of fine-machined surfaces by interferometric means is discussed. A variety of fine-machined surfaces shows parameters of hight in the range of microns. So it is necessary to increase the interferometric increment in a two-beam-interferometer with visible light by grazing incidence illumination. This principle was investigated in a new prism interferometer. A test method for the interferometer is proposed and measurements are represented.

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