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Fraunhofer-Institut für Produktionsanlagen und Konstruktionstechnik IPK
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PublicationInterferometrische Messung der Form, Welligkeit und Rauheit feinbearbeiteter Oberflächen( 1992)
;Nyarsik, L. ;Körner, K. ;Krahn, A.Spur, G.A possibility for measuring the form, waviness and roughness of fine-machined surfaces by interferometric means is discussed. A variety of fine-machined surfaces shows parameters of hight in the range of microns. So it is necessary to increase the interferometric increment in a two-beam-interferometer with visible light by grazing incidence illumination. This principle was investigated in a new prism interferometer. A test method for the interferometer is proposed and measurements are represented.