Grazing-incidence interference microscopy for the measurement of topography of fine-machined surfaces
1993,
Spur, G.,
Körner, K.,
Nyarsik, L.,
Fritz, H.,
Uhlmann, E.
A possibility for measuring the form, waviness and roughness of fine-machined surfaces by interferometric means is discussed. A variety of fine-machined surfaces shows parameters in the range of microns. So it is necessary to increase the interferometric increment in a two-beam-interferometer with visible light by grazing incidence illumination. This principle was investigated in a new prism interferometer and in a new grazing incidence microscope. Test measurements are represented and discussed.