Fraunhofer-Institut für Photonische Mikrosysteme IPMS

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  • Publication
    Highly reflective optical coatings for high power applications of micro scanning mirrors in the UV-VIS-NIR spectral region
    ( 2006)
    Sandner, T.
    ;
    Schmidt, J.U.
    ;
    Schenk, H.
    ;
    Lakner, H.
    ;
    Yang, M.
    ;
    Gatto, A.
    ;
    Kaiser, N.
    ;
    Braun, S.
    ;
    Foltyn, T.
    ;
    Leson, A.
  • Publication
    Highly reflective coatings for micromechanical mirror arrays operating in the DUV and VUV spectral range
    ( 2005)
    Sandner, T.
    ;
    Schmidt, J.U.
    ;
    Schenk, H.
    ;
    Lakner, H.
    ;
    Gatto, A.
    ;
    Yang, M.
    ;
    Kaiser, N.
    ;
    Braun, S.
    ;
    Foltyn, T.
    ;
    Leson, A.
    High reflecting low-stress optical coatings for the next-generation of micro mechanical mirrors have been developed. The optimized metal systems are applicable from VUV and DUV down to the UV and VIS spectral region and can be integrated in the technology of MOEMS, such as spatial light modulators (SLM) and micro scanning mirrors. This optimized metal designs enable to reconcile high optical performances with adequate mechanical properties and convenient CMOS compatibility. Currently, micro-mirror arrays with enhanced highly reflective coatings for DUV (A. = 193 nm) and VUV ()t 157 nm) exist as prototypes.
  • Publication
    Highly reflective thin film coatings for high power applications of micro scanning mirrors in the NIR-VIS-UV spectral region
    ( 2005)
    Sandner, T.
    ;
    Schmidt, J.U.
    ;
    Schenk, H.
    ;
    Lakner, H.
    ;
    Yang, M.
    ;
    Gatto, A.
    ;
    Kaiser, N.
    ;
    Braun, S.
    ;
    Foltyn, T.
    ;
    Leson, A.
    This paper addresses different highly reflective optical coatings on micro scanning mirrors (MSM) for applications in the NIR-VIS-UV-spectral region to enable new applications at high optical power density like laser marking and material treatment. In the common case of MSM with an unprotected Al coating, the absorption limits the maximal power density because of induced heating. In contrast to macroscopic optics HR-micro mirror coatings have to guarantee additional demands like low-stress and CMOS compatibility. Hence, to enable novel high power applications of MSM in the NIR-VIS-UV spectral region highly reflective low-stress coatings have been developed according to a triple strategy: (a) broadband metallic reflectors, (b) dielectric multilayers and (c) enhanced hybrid coatings. For Au and Ag based NIR-coatings an excellent mirror planarity and a reflectance around 99 % (@ 1064 nm) have been achieved, whereas dielectric coatings reached 99.7 % for a (LH)4 design and thinner low-stress hybrid NIR-coatings reached up to 99.8% enabling an improved mirror planarity and excellent laser damage threshold. For the VIS and UV spectral region enhanced hybrid HR-coatings have been favored, because they enable high reflectance of up to 99.7 % @ 633 nm or 98.8 % @ 308 nm in combination with low stress, high mirror planarity and CMOS compatibility.
  • Publication
    Micromechanical scanning mirrors with highly reflective NIR coatings for high power applications
    ( 2005)
    Sandner, T.
    ;
    Schmidt, J.U.
    ;
    Schenk, H.
    ;
    Lakner, H.
    ;
    Braun, S.
    ;
    Foltyn, T.
    ;
    Leson, A.
    ;
    Gatto, A.
    ;
    Yang, M.
    ;
    Kaiser, N.
    This paper addresses different highly reflective optical coatings on micro scanning mirrors (MSM) for applications in the NIR-spectral region to enable new applications like laser marking and material treatment at high optical power density. In the case of MSM with an unprotected Al coating, the absorption limits the maximal power density because of induced heating. The damage threshold for unprotected Al coatings was investigated. In addition highly reflective enhanced metallic and dielectric multilayer coatings for the NIR have been developed and characterized. These coatings resolve the problems of unprotected aluminum coatings related to NIR absorption and the resulting limitation of applicable laser power density. The coatings ensure a high reflectance even in corrosive environments. Enhanced metallic broadband reflectors reach a reflevctivity of 98.7% at 1064nm whereas narrow-band dielectric multilayer coatings reach a reflectivity of 99.7% at 1064 nm.
  • Publication
    Improved mechanical properties of metallic micro-structures
    ( 2004)
    Schreiber, J.
    ;
    Braun, S.
    ;
    Gatto, A.
    ;
    Schenk, H.
    Properties of materials used in micro- and nano-technology are rather different from those of bulk material and even to lateral macroscopic extended thin films. Designing MOEMs components, it has to be clarified how functionality and reliability of the micro-devices are influenced. Suitable tools are necessary to test the materials properties on micro- and submicro-scale. The application of Al- and Ti-layers in micro-mirror devices is discussed. Attempts to control and improve their mechanical properties in accordance with the application requirements for micro-mirror devices are described.