Fraunhofer-Institut für Photonische Mikrosysteme IPMS

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  • Publication
    Lanthanide tri-fluorides: A survey of the optical, mechanical and structural properties of thin films with emphasis of their use in the DUV - VUV - spectral range
    ( 2005)
    Uhlig, H.
    ;
    Thielsch, R.
    ;
    Heber, J.
    ;
    Kaiser, N.
    The present candidates for low loss dielectric optical coatings at VUV excimer laser wavelengths are fluorides. Within this group, only one material - namely lanthanum fluoride - is used almost exclusively as high index film material. In search of additional high index film materials for use in VUV we investigated a broader spectrum of lanthanide trifluorides since little is known about their properties and the advantages or disadvantages with regards of their use in DUV- and VUV - optical stacks. Fluorides of lanthanum, neodymium, samarium, gadolinium, ytterbium and also yttrium were evaporated thermally. Precision VUV-measurement were initiated to give an overview of the ranges of UV-transparency up to the absorption edges and to determine the optical indices of these coating materials. Supplementary, also stress measurements, atomic force microscopy and XRD measurements were performed to scrutinize the properties of the films.
  • Publication
    Optical, structural, and mechanical properties of gadolinium trifluoride thin films grown on amorphous substrates
    ( 2005)
    Thielsch, R.
    ;
    Heber, J.
    ;
    Uhlig, H.
    ;
    Kaiser, N.
    Since excimer laser applications extend to deep and vacuum UV wavelengths at 248 nm, 193 nm and 157 nm, renewed research interest has recently arisen on fluoride thin films due to their unrivaled position as wide-bandgap material for the vacuum UV (VUV). Among these materials, only a very limited number can act as the high refractive index component in multiplayer interference stacks. Besides LaF3, gadolinium tri-fluoride is a potential candidate especially for wavelengths at about and below 200nm. We report on the evaluation of the structural properties, the optical properties with emphasis to the DUV - spectral range, and the mechanical properties of GdF3 single layer by means of XRD, GIXR, AFM measurements, spectral photometry and by ex-situ mechanical stress analysis using the laser beam deflection method to measure the substrate deformation. The samples were deposited onto fused silica and silicon substrates by a low-loss evaporation technology in a BAK 640 coating plant applying various deposition conditions.
  • Publication
    VUV optical coatings for the next-generation micro-mechanical mirrors
    ( 2005)
    Yang, M.
    ;
    Gatto, A.
    ;
    Kaiser, N.
    ;
    Schmidt, J.U.
    ;
    Sandner, T.
    ;
    Heber, J.
    ;
    Schenk, H.
    ;
    Lakner, H.
    This paper deals with vacuum UV optical coatings for micro mirrors applications. High reflecting low-stress optical coatings for the next-generation of micro mechanical mirrors have been developed. The optimized metal systems are applicable for the VUV spectral region and can be integrated in the technology of MOEMS, such as spatial light modulators (SLM) and micro scanning mirrors.