Title

Reliability, testing, and characterization of MEMS/MOEMS

Title Supplement
27 - 29 January 2003, San Jose, California, USA; conference, part of the Micromachining and Microfabrication Symposium at SPIE's Photonics West 2003, January 25 - 31, 2003
Person Involved
Corporate Author
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Publisher
Publishing Place
Bellingham, WA
Publication Date
2003
Series
Proceedings of SPIE; 4980
ISBN
0-8194-4780-3
Conference