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Title
Reliability, packaging, testing, and characterization of MEMS/MOEMS VII
Title Supplement
21 - 22 January, 2008, San Jose, California, USA
Corporate Author
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Publisher
Publishing Place
Bellingham, WA
Publication Date
2008
Series
Proceedings of SPIE; 6884
ISBN
978-0-8194-7059-1