Title

Instrumentation, metrology, and standards for nanomanufacturing III

Title Supplement

3 - 5 August 2009, San Diego, California, United States

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2009

Series

Proceedings of SPIE; 7405

ISBN

978-0-8194-7695-1

Conference