Title

Optical microlithography XXIV. Vol.1

Title Supplement

1 - 3 March 2011, San Jose, California, United States; part of SPIE advanced lithography

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2011

Series

Proceedings of SPIE; 7973

ISBN

978-0-8194-8532-8

Conference