Title

Microsystems engineering: Metrology and inspection

Title Supplement

20 - 21 June 2001, Munich, Germany

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2001

Series

Proceedings of SPIE; 4400

ISBN

0-8194-4095-7

Conference