Title

Special issue of the Conference "Smart Sensors, Actuators and MEMS", within the SPIE Europe Symposium "Microtechnologies for the New Millennium" 2009

Title Supplement

Dresden, Germany, 4 - 6 May 2009

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Berlin

Publication Date

2010

Series

Microsystem technologies; 16.2010, Nr.5

ISSN

0946-7076

Conference