Title

Wafer-Bonding Workshop for MEMS Technologies, WBW-MEMS 2004. Special Issue

Title Supplement

11 - 12 October 2004, Halle: Two-day Workshop on "Wafer Bonding for MEMS Technologies"

Person Involved

Publisher

Publishing Place

Berlin

Publication Date

2006

Series

Microsystem technologies; 12.2006,Nr.5

Conference