Title

35th European Mask and Lithography Conference, EMLC 2019

Title Supplement

17-19 June 2019, Dresden, Germany

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2019

Series

Proceedings of SPIE; 11177

ISBN

978-1-5106-3067-3

978-1-5106-3068-0

Conference