Title

Spectroscopic characterization techniques for semiconductor technology IV

Title Supplement

25 - 26 March 1992, Somerset, New Jersey. Proceedings

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

1992

Series

Proceedings of SPIE; 1678

ISBN

0-8194-0839-5

Conference