Title

Reliability, testing, and characterization of MEMS/MOEMS III

Title Supplement

26 - 28 January 2004, San Jose, California, USA. SPIE Conference on Reliability, Testing, and Characterization of MEMS/MOEMS

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2004

Series

Proceedings of SPIE; 5343

ISBN

0-8194-5251-3

Conference

Keyword(s)

MEMS

;

MOEMS

;

testing