Title

Analytical and diagnostic techniques for semiconductor materials, devices, and processes 7

Title Supplement

Symposium, part of the fall Electrochemical Society meeting in Washington, DC, held on October 7 - 12, 2007

Person Involved

Corporate Author

Electrochemical Society -ECS-, Electronics and Photonics Division

Publisher

Publishing Place

Pennington, NJ

Publication Date

2007

Series

ECS transactions; 11.2007, Nr.3: Dielectric and semiconductor materials, devices, and processing

ISSN

1938-5862

ISBN

978-1-566-77579-3

978-1-566-77569-4

Conference

DDC

660