Title

Electron-beam, x-ray and ion-beam technology. Submicrometer lithographies IX

Title Supplement

7 - 8 March 1990, San Jose, Calif.

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

1990

Series

Proceedings of SPIE; 1263

ISBN

0-8194-0310-5

Conference