Title

Ultra clean processing of semiconductor surfaces XI

Title Supplement
Selected, peer reviewed papers from the 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 17 - 19, 2012, Gent, Belgium
Person Involved
Corporate Author
Interuniversity Micro-Electronics Center -IMEC-, Louvain
Publisher
Publishing Place
Durnten-Zurich
Publication Date
2013
Series
Solid state phenomena; 195
ISBN
978-3-03-785527-0
Conference