Title

Frontiers of characterization and metrology for nanoelectronics 2009. CD-ROM

Title Supplement

International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Albany, New York, 11 - 15 May 2009

Person Involved

Corporate Author

American Institute of Physics -AIP-, New York

Publisher

Publishing Place

Melville, NY

Publication Date

2009

Series

AIP Conference Proceedings; 1173

ISBN

0-7354-0712-6

978-0-7354-0712-1

Conference