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Title
Frontiers of Characterization and Metrology for Nanoelectronics 2011
Title Supplement
Grenoble (France), 23-26 May 2011
Person Involved
Corporate Author
American Institute of Physics -AIP-, New York
Publisher
Publishing Place
New York, N.Y.
Publication Date
2011
Series
AIP Conference Proceedings; 1395
ISBN
978-0-7354-0965-1
978-0-7354-0973-6