Title

DTIP of MEMS & MOEMS: Design, test, integration and packaging of MEMS/MOEMS 2003

Title Supplement

Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS ; Mandelieu-la-Napoule, Côte d'Azur, France, 5 - 7 May 2003

Person Involved

Corporate Author

IEEE Components, Packaging, and Manufacturing Technology Society

Publisher

Publishing Place

Piscataway, NJ

Publication Date

2003

ISBN

0-7803-7066-X

Conference