Title

IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. Vol.2

Title Supplement

Taipei, Taiwan, 20 - 24 January 2013

Corporate Author

Institute of Electrical and Electronics Engineers -IEEE-

IEEE Robotics and Automation Society

Publisher

Publishing Place

New York, NY

Publication Date

2013

ISBN

978-1-4673-5654-1

978-1-4673-5655-8

Conference