Title

1st EUSPEN Topical Conference on Fabrication and Metrology in Nanotechnolgy 2000. Proceedings

Person Involved

Corporate Author

Center for Geometrical Metrology, Lyngby

Technical University of Denmark -DTU-, Department of Manufacturing Engineering, Lyngby

Danish Institute for Fundamental Metrology

International Institution for Production Engineering Research -CIRP-, Paris

European Society for Precision Engineering and Nanotechnology -EUSPEN-

Publishing Place

Lyngby

Publication Date

2000

Conference