Title

Electron-beam, x-ray, and ion-beam submicrometer lithographies for manufacturing II

Title Supplement

8 - 9 March 1992, San Jose, California

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

1992

Series

Proceedings of SPIE; 1671

ISBN

0-8194-0826-3

Conference