Title

Three-dimensional imaging, optical metrology, and inspection IV

Title Supplement

2-3 November 1998, Boston, Mass.

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

1998

Series

Proceedings of SPIE; 3520

ISBN

0-8194-2981-3

Conference