Title

Reliability, packaging, testing and characterization of MEMS/MOEMS and nanodevices IX

Title Supplement

25 - 26 January 2010, San Francisco, California, United States; organized as a part of SPIE Photonics West on MOEMS-MEMS

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2010

Series

Proceedings of SPIE; 7592

ISBN

978-0-8194-7988-4

Conference