Title

Reliability, packaging, testing and characterization of MEMS/MOEMS and nanodevices XI

Title Supplement

23 - 24 January 2012, San Francisco, California, United States

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2012

Series

Proceedings of SPIE; 8250

ISBN

978-0-8194-8893-0

Conference