Title

Reliability, packaging, testing, and characterization of MEMS/MOEMS VI

Title Supplement

23 - 24 January, 2007, San Jose, California, USA

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2007

Series

Proceedings of SPIE; 6463

ISBN

0-8194-6576-3

978-0-8194-6576-4

Conference