Title

Laser-based micro- and nanopackaging and assembly V
Titel Supplements
25 - 27 January 2011, San Francisco, California, United States; Conference LBMP-V as part of LASE 2011 at Photonics West
Institut
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Verlag
Verlagsort
Bellingham, WA
Datum
2011
Serie
Proceedings of SPIE
ISBN
978-0-8194-8458-1
Konferenz