Title

Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing VI

Title Supplement

11-13 March, 1996, Santa Clara, California

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

1996

Series

Proceedings of SPIE; 2723

ISBN

0-8194-2099-9

Conference