Title

Crystalline defects and contamination: their impact and control in device manufacturing IV

Title Supplement

DECON 2005 ; proceedings of the satellite symposium to ESSDERC 2005, Grenoble, France ; Satellite Symposium on Crystalline Defects and Contamination: Their Impact and Control in Device Manufacturing

Person Involved

Corporate Author

Electrochemical Society -ECS-, Electronics and Photonics Division

Publisher

ECS

Publishing Place

Pennington, NJ

Publication Date

2005

Series

Electrochemical Society. Proceedings; 2005-10

ISBN

1-566-77428-4

Conference

Satellite Symposium on Crystalline Defects and Contamination: Their Impact and Control in Device Manufacturing (DECON) 2005

European Solid State Device Research Conference (ESSDERC) 2005

Options

Crystalline defects and contamination: their impact and control in device manufacturing IV