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  4. Multiwavelength digital holography: Height measurements on linearly moving and rotating objects
 
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2018
Conference Paper
Title

Multiwavelength digital holography: Height measurements on linearly moving and rotating objects

Abstract
Multiwavelength digital holography enables precise and fast 3D height measurements of rough surfaces. To inspect objects during motion would enlarge the range of applications enormously. In this work the limits of this technique with respect to velocity and inclination angles are studied for linearly moving as well as for rotating objects. We demonstrate measurements on surfaces with inclination angles of up to 40° , moving linearly with a velocity of 2 mm/s, providing 2 mm accuracy, and on a rotating cylinder with circumferential speed of 10 mm/s, we achieve 1.1 mm precision. All measurements are conducted with less than 1 mW of continuous-wave laser light, so the object moves several micrometers during exposure time.
Author(s)
Schiller, Annelie  
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Beckmann, Tobias
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Fratz, Markus  
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Bertz, Alexander  
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Carl, Daniel  
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Buse, Karsten  
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Mainwork
Speckle 2018, VII International Conference on Speckle Metrology  
Conference
International Conference on Speckle Metrology (SPECKLE) 2018  
Open Access
File(s)
Download (9.47 MB)
Rights
Use according to copyright law
DOI
10.24406/publica-r-401608
10.1117/12.2319938
Language
English
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Keyword(s)
  • multiwavelength holography

  • digital holography

  • surface inspection

  • 3D hight measurement

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