3D simulation of topography and doping processes at FhG

Lorenz, J.J.LorenzBär, E.E.BärBurenkov, A.A.BurenkovHenke, W.W.HenkeTietzel, K.K.TietzelWeiß, M.M.Weiß2022-03-092022-03-091995https://publica.fraunhofer.de/handle/publica/323926en6706205303D simulation of topography and doping processes at FhGconference paper