Simulation of larger mask areas using the waveguide method with fast decomposition technique

Evanschitzky, P.P.EvanschitzkyShao, F.F.ShaoErdmann, A.A.ErdmannReibold, D.D.Reibold2022-03-102022-03-102007https://publica.fraunhofer.de/handle/publica/35686110.1117/12.746631en670620530Simulation of larger mask areas using the waveguide method with fast decomposition techniqueconference paper